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Please use this identifier to cite or link to this item: http://hdl.handle.net/2328/8607

Title: Polyelectrolyte nanolayers as diffusion barriers for Cu metallization
Authors: Ganesan, P G
Gamba, J
Ellis, Amanda Vera
Kane, R S
Ramanath, G
Issue Date: 2003
Citation: Ganesan, P.G., Gamba, J., Ellis, A.V., Kane, R.S., & Ramanath, G., 2003. Polyelectrolyte nanolayers as diffusion barriers for Cu metallization. Applied Physics Letters, 83(16), 3302-3305.
URI: http://hdl.handle.net/2328/8607
ISSN: 0003-6951
Appears in Collections:0299 - Other Physical Sciences

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