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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2328/8607
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| Title: | Polyelectrolyte nanolayers as diffusion barriers
for Cu metallization |
| Authors: | Ganesan, P G
Gamba, J
Ellis, Amanda Vera
Kane, R S
Ramanath, G |
| Issue Date: | 2003 |
| Citation: | Ganesan, P.G., Gamba, J., Ellis, A.V.,
Kane, R.S., & Ramanath, G., 2003. Polyelectrolyte nanolayers as diffusion barriers
for Cu metallization. Applied Physics Letters, 83(16), 3302-3305. |
| URI: | http://hdl.handle.net/2328/8607 |
| ISSN: | 0003-6951 |
| Appears in Collections: | 0299 - Other Physical Sciences
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