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Elastic cross-sections for electron scattering from GeF4: predominance of atomic-F in the high-energy collision dynamics
(American Institute of Physics, 2012)
We report absolute differential cross sections (DCSs) for elastic electron scattering from GeF4. The incident electron energy range was 3–200 eV, while the scattered electron angular range was typically 15°–150°. In addition, ...
Elastic cross sections for electron collisions with molecules relevant to plasma processing
(American Institute of Physics, 2010)
Absolute electron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. Low-energy electron collision data for these ...